ULTRA HIGH PURITY BULK GAS VALVES
ULTRA HIGH PURITY BULK GAS VALVES
Ultra high purity manual bellows valves operate reliably at the highest gas flow for atmosphere cleaning in ultra high purity systems.
INCLUDES
UHP HIGH-FLOW BULK FACILITY VALVE (UP TO 375 PSIG) – 700 SERIES
The 700 Series High-Flow Bulk Facility Valve is intended for use in ultra-high purity gas distribution systems. It features a unique lightweight design that reduces installation costs and can accommodate connection sizes up to 6-inches.
The Parker 700 Series Bulk Facility Valve (with high flow bellows) offers superior performance and reliability in ultra-high purity (UHP) gas distribution and bulk delivery systems.
ULTRA HIGH PURITY BULK GAS VALVES
The 700 Series unique low-weight design reduces installation costs compared to valves of similar size and flow capacities on the market. It exhibits excellent leak integrity and gas containment capabilities, making it ideal for use in applications where process cleanliness is critical, including microelectronic manufacturing operations.
The 700 Series Bulk Facility Valve provides a number of advantages over traditional ball valve designs, including minimal particle generation and lower internal and external leak rates. This reduces process gas contamination, which is essential to wafer/semiconductor production.
Valve materials of construction increase durability and resistance to process gas corrosion. Bodies are constructed from electropolished 316L Stainless Steel. Valve sizes 1.5-inch and larger utilize an Inconel 625 bellows, which provides superior strength and corrosion resistance, affording the 700 Series with maximum cycle life at operating pressures up to 375 psig.
700 Series Valves are built in a Class 100 cleanroom. 100% of the valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.
Markets:
• Semiconductor Fab
• Gas Companies
Features/Benefits:
• Lightweight design reduces installation costs
• Sizes up to 6-inches available
• Maximum operating pressure 375 psig (250 psig 1-inch size)
• Internal leak rate: 1 x 10-10 scc/sec He (rated)
• External leak rate: 1 x 10-10 scc/sec He
• Available in manual and air actuated (AOP) configurations
• Air actuated options available in 1-inch, 1.5-inch, and 2-inch sizes
• Inlet and outlet purge ports
Applications:
• Gas Cabinets