ULTRA HIGH PURITY CHECK VALVES

Ultra High Purity Check Valves

The CV-1 Series Check Valve has a machined PTFE spring that allows for low cracking pressure operation and minimal back pressure for resealing. It offers exceptional corrosion resistance and is designed for use in ultra-high purity applications.

The CV-1 Series is a fluoropolymer check valve that comes available in sizes ranging from 1/8 to 1-1/2 inch. It features a machined PTFE spring that allows for extremely low cracking pressure operation (0.25 psig) and minimal back pressure for resealing. The body of the valve is made from machined PTFE, affording it high cycle life and superior corrosion resistance without requiring o-rings for sealing. The check valve is ideally suited for use in ultra-high purity (UHP) and aggressive chemical applications, including blending systems and wet benches in semiconductor manufacturing operations.

Depending on customer requirements, the CV-1 Series can be fitted with a variety of end configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical. The valve’s compact design reduces requirements for mounting, making it advantageous in areas of facilities where space is limited.

The CV-1 Series check valve’s tongue and groove external seal ensures a positive body seal. This, coupled with internally polished surfaces, results in minimal particle entrapment and complete isolation of corrosive process media at working pressures up to 120 psig. Elimination of o-rings enables the CV-1 Series to be compatible with a wide range of highly corrosive process fluids.

UHP PTFE FLUOROPOLYMER CHECK VALVE (UP TO 1-1/2 INCH) – CV-1 SERIES

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features and Benefits:
• Machined PTFE spring allows for extremely low cracking pressure operation (0.25 psig) and minimal back pressure for resealing (back check sealing pressure is 5 psig)
• PTFE components afford high cycle life and superior corrosion resistance without requiring o-rings for sealing, which eliminates compatibility issues
• Fully functional from vacuum to 120 psig
• Available in sizes ranging from 1/8 to 1-1/4 inch
• Can be fitted with a variety of end configurations, including Parflare and Pargrip tube fittings
• Variety of available body styles provides flexibility with regards to operating temperature ranges

Applications:
• Corrosive and specialty chemicals, acids, bases, and slurries
• Semiconductor tools hook-ups
• Wet benches
• Blending systems

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.

Parker Veriflo Division’s F9 Series UHP Check Valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition. The F9’s two seal materials meet all Semi gas compatibility requirements, reducing customer inventories and meeting a wider range of applications. Assembled and packaged in a Class 100 clean room, the F9 is designed for use in ultrahigh purity semiconductor applications.

UHP STAINLESS STEEL CHECK VALVE – F9 SERIES

Markets:
• Semiconductor Fab
• Gas Companies

Features/Benefits:
• Noise Free Operation with the patented asymmetric spring design
• Welded design reduces footprint
• Two seal offerings to meet all SEMI gas compatibility requirements
• Class 100 clean room assembled and packaged
• Electropolished (EP) version for Ultra High Purity applications available
• VeriClean™ 316L Stainless Steel enhances electropolishing and corrosion resistance

Applications:
• Valve Manifold Boxes/Panels
• Gas Cabinets
• Gas Sticks
• Tool Hook-Up

The CV-32 Series PTFE High-flow Check Valve provides low cracking pressure and high integrity sealing for back flow protection. It is ideally suited for bulk chemical delivery systems used in ultra-high purity semiconductor manufacturing applications.

The CV-32 Series is a 2 inch high-flow fluoropolymer check valve that is designed for use in ultra-high purity (UHP) semiconductor manufacturing applications, including bulk delivery systems and chemical manifold boxes (CMBs). The valve is metal free – utilizing a body and components (including the spring) that are fabricated from machined PTFE. These materials afford the valve long life, exceptional corrosion resistance, and compatibility with a broad range of aggressive process media.

The CV-32 Series provides extremely low cracking pressure (1 psig) and high integrity sealing for back flow protection (back check pressure 5 – 8 psig). It is equipped with Parbond end fittings that can be removed for welding, which reduces field assembly time, simplifies maintenance, and ensures a leak-tight seal for performance in applications where cleanliness is critical. The valve offers high flow (6.75 Cv) at working pressures up to 80 psig. Its compact design reduces requirements for mounting, making it advantageous in areas where space is limited.

The CV-32 Series check valve’s tongue and groove external seal creates a positive body seal. This, coupled with polished wetted surfaces, ensures minimal particle entrapment and contamination-free operation.

UHP PTFE FLUOROPOLYMER HIGH-FLOW CHECK VALVE (2 INCH) – CV-32 SERIES

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Machined PTFE spring allows for extremely low cracking pressure operation (1 psig) and minimal back pressure for resealing (back check sealing pressure is 5 – 8 psig)
• PTFE components afford high cycle life and superior corrosion resistance without requiring o-rings for sealing, which eliminates compatibility issues
• Designed to meet the needs of high-flow UHP and bulk chemical delivery applications, which are trending larger diameter piping and tubing systems
• Fully functional from vacuum to 80 psig
• Equipped with Parbond end fittings that can be removed for welding
• High flow in a compact package (6.75 Cv)

Applications:
• Corrosive and specialty chemicals, acids, bases, and slurries
• Bulk chemical delivery systems
• Chemical Manifold Boxes (CMBs)