ULTRA HIGH PURITY DIAPHRAGM VALVES

The PV-10 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way or 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 80 psig).

The PV-10 Series is 1/4 inch air-operated (AOP) PFA diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including semiconductor manufacturing and clean-area applications. The valves is available in 2-way and 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

PV-10-Pneumatic-3-Way-Valve Series

The PV-10 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and high cycle life for lower replacements costs and less downtime. The valve also features a Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, PV-10 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The PV-10 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove ensures a positive diaphragm to body seal, resulting in minimal particle entrapment and isolation of process media from the actuator. The valve features a full 1/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 80 psig. Flow capacities range from 0.20 – 0.62 depending on port size and configuration.

The actuator in the PV-10 Series works on as little as 20 psi for ease of installation and maintenance.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Pressure rated in both forwards and backwards direction from vacuum to 80 psig
• Available in 2-way and 3-way configurations
• Compact actuator design has a 20 – 120 psig AOP actuation pressure
• Can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-13 Series PFA Manual Needle Valve offers excellent leak integrity and exceptional resistance to corrosion. It has a PTFE ferrule and is designed to provide precise flow control in ultra-high purity and aggressive fluid handling applications.

The MV-13 Series is a manually operated needle valve that offers precise control of flow in corrosive liquid and gas distribution systems, including those used in ultra-high purity (UHP) semiconductor manufacturing and clean-area applications.

MV-13-Manual-Needle-Valve Series

The MV-13 Series features a molded PFA body and stem for high cycle life and extreme resistance to corrosion. The PFA stem stop prevents removal of the stem from the body when in service, thus ensuring safe and reliable operation from vacuum to working pressures up to 100 psig. The valve’s PTFE ferrule creates a leak-tight seal between the stem and body, which allows the valve to be utilized in applications where cleanliness and minimal particle generation are critical. The non-wetted components (PFA, ETFE, PVDF) of the MV-13 Series are also highly durable and afford the needle valve with high strength and maintenance-free operation.

The MV-13 Series needle valve is available in straight through and angle configurations, along with several orifice sizes. Depending on customer requirements, the valve can be fitted with a variety of inlet and outlet port connection sizes and types, including Parflare and Pargrip tube fittings. Both Parflare and Pargrip fittings allow for ease of assembly, thus reducing installation time and ensuring a leak-tight seal for minimal downtime.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Ideal for use in UHP and aggressive and/or corrosive fluid handling systems, including semiconductor manufacturing and clean-area applications
• One piece PFA stem/handle and bodies provides strength and corrosion resistance
• Stem sealing area is precision-machined for smooth, consistent flow
• PTFE ferrule ensures a leak-tight seal between stem and body
• Available in in straight through and angle configurations, along with several orifice sizes and inlet/outlet port connections, including Parflare and Pargrip fittings
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
• Fully functional from vacuum to 100 psig

Applications:
• Corrosive liquids and gases
• Semiconductor Tools
• Tool Hook-ups
• Process Instrumentation

The PV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way and 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).

PV-11-Pneumatic-3-Way-Valve Series

The PV-11 Series is a 1/2 inch air-operated (AOP) PFA diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including those used in semiconductor manufacturing and clean-area operations. The valve is available in 2-way and 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance. With a multi-position mounting base, the 3-way configurations allow for increased mounting flexibility and connector fitting reduction, making them advantageous in areas where workable space is limited.

PV-11 Series PFA valves feature a Fluoropolymer-coated stainless steel spring which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valves are also equipped with a one-piece modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. For increased flexibility, the PV-11 Series can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.

The tongue and groove seal of the PV-11 Series valve ensures a positive diaphragm to body seal, resulting in high cycle life. Its full 1/2 inch orifice offers maximum flow capability in a compact package. Flow capacities vary depending on port size and configuration type (up to 3.7 C¬v).

The PV-11 Series is available with a submergible option, which isolates all valve components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Available in 2-way or 3-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Full 1/2 inch orifice provides maximum flow capability in a compact package
• Fully functional from vacuum to 100 psig
• Actuation pressure: 60 – 100 psig
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-12 Series PFA Diaphragm Valve offers high leak integrity and exceptional corrosion resistance. It is ideally suited for use in ultra-high purity (UHP) and aggressive fluid applications. Available in 2-way configurations.

MV-12-Manual-2-Way-Valve Series

The MV-12 Series is a 1 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including those used in semiconductor manufacturing operations. The valve is available in 2-way configurations. The 3-way configurations have a multi-position mounting base, which allows for more mounting flexibility and connector fitting reduction, making them advantageous in areas where workable space is limited.

The MV-12 Series features a molded PFA body with precision-machined sealing areas. It utilizes a Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. Depending on customer requirements, the MV-12 Series valve can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. Both Parflare and Parbond fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.

The tongue and groove seal of the MV-12 Series PFA valve ensures a positive diaphragm to body seal, resulting in superior leak integrity, lower replacement costs, and isolation of process media. The series’ full 1 inch orifice offers maximum flow capability in a compact package (up to 15.7 C¬v for MV-12 with Parbond). Flow capacities are dictated by configuration and end type. The valve is bidirectionally pressure rated at 100 psig and requires three full turns to go from the fully closed to fully open position.

The MV-12 Series is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Equipped with Viton® Fluoroelastomer seals
• Available in 2-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Full 1 inch orifice provides maximum flow capability in a compact package
• Bidirectionally pressure rated up to 100 psig
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The PV-16 Series PFA Diaphragm Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive liquid and gas applications.

The PV-16 Series is a 3/4 inch PFA air-operated diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive fluid handling applications, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

PV-16-Pneumatic-PFA-3-Way-Valve Series

The PV-16 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and higher cycle life than conventional PTFE. The valve also features an Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, PV-16 Series valves can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The PV-16 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in high cycle life, lower replacement costs, and isolation of process media from the actuator. The valve features a full 3/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 120 psig. Flow capacities are dictated by configuration and end type (up to 7.9 C¬v for PV-16 with Parbond or Parflare connection). The valve’s actuation pressure ranges from 60 – 120 psig.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Bidirectionally pressure rated from vacuum to 120 psig
• Available in 3-way configuration
• Compact actuator design has a 60 – 120 psig actuation pressure
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-10 Series PFA Manual Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 80 psig).

The MV-10 Series is a 1/4 inch manually operated PFA diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including those seen in semiconductor manufacturing and clean-area applications. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

The MV-10 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and high cycle life for lower replacement costs and less downtime. It also features a Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, MV-10 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

MV-10-Manual-3-Way-Valve Series

The MV-10 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in minimal particle entrapment and isolation of process media. The valve features a full 1/4 inch orifice with no restrictions for maximum flow at working pressures up to 80 psig. Flow capacities range from 0.20 – 0.62 depending on port size and configuration.

The MV-10 is 1/4 turn operated and has a removable handle for tamper resistance, which eliminates the requirement for a separate lockout device.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Pressure rated in both forwards and backwards direction from vacuum to 80 psig
• Available in 3-way configurations
• Can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings
• 1/4 turn operated with removable handle for tamper resistance
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The PV-12 Series PFA Diaphragm Valve offers high leak integrity and exceptional corrosion resistance. It is ideally suited for use in ultra-high purity (UHP) and aggressive fluid applications. Available in 2-way and 3-way configurations.

The PV-12 Series is a 1 inch PFA air-operated diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including those used in semiconductor manufacturing operations. The valve is available in 2-way and 3-way configurations. The 3-way configurations have a multi-position mounting base, which allows for more mounting flexibility and connector fitting reduction, making the advantageous in areas where workable space is limited.

PV-12 Valve Series

The PV-12 Series features a molded PFA body with precision-machined sealing areas. It utilizes a Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. Depending on customer requirements, the PV-12 Series valve can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. Both Parflare and Parbond fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.

The tongue and groove seal of PV-12 Series valves ensures a positive diaphragm to body seal, resulting in superior leak integrity, lower replacement costs, and isolation of process media from the actuator. The series’ full 1 inch orifice offers maximum flow capability in a compact package (up to 15.7 C¬v for PV-12 with Parbond). Flow capacities are dictated by configuration and end type. The valve is bidirectionally pressure rated at 100 psig and has an actuation pressure range from 60 – 100 psig.

The PV-12 Series is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Equipped with Viton® Fluoroelastomer seals
• Available in 2-way or 3-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Actuation pressure range: 60 to 100 psig
• Full 1 inch orifice provides maximum flow capability in a compact package
• Bidirectionally pressure rated up to 100 psig
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-16 Series PFA Diaphragm Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way configurations and is designed for ultra-high purity (UHP) and aggressive liquid and gas applications.

MV-16-Manual-PFA-2-Way-Valve Series

The MV-16 Series is a 3/4 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive fluid handling applications, including semiconductor manufacturing operations. The valve is available in 2-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

The MV-16 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and higher cycle life than conventional PTFE. The valve also features an Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, MV-16 Series valves can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The MV-16 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in high cycle life, lower replacement costs, and isolation of process media. The valve features a full 3/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 120 psig. Flow capacities are dictated by configuration and end type (up to 7.9 C¬v for MV-16 with Parbond or Parflare connection). The MV-16 has multi-turn capability, which allows for precise flow adjustment.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Pressure rated in both forwards and backwards direction from vacuum to 120 psig
• Available in 2-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Multi-turn capability allows for precise flow adjustment
• MV-16 Series has multi-turn capability, which allows for precise flow adjustment
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The PV-16 Series PFA Diaphragm Valve offers high leak integrity and excellent resistance to corrosion. It is available in 2-way configurations and is designed for ultra-high purity (UHP) and aggressive liquid and gas applications.

PV-16 Valve Series

The PV-16 Series is a 3/4 inch PFA air-operated diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive fluid handling applications, including semiconductor manufacturing operations. The valve is available in 2-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

The PV-16 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and higher cycle life than conventional PTFE. The valve also features an Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, PV-16 Series valves can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The PV-16 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in high cycle life, lower replacement costs, and isolation of process media from the actuator. The valve features a full 3/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 120 psig. Flow capacities are dictated by configuration and end type (up to 7.9 C¬v for PV-16 with Parbond or Parflare connection). The valve’s actuation pressure ranges from 60 – 120 psig.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Bidirectionally pressure rated from vacuum to 120 psig
• Available in 2-way configuration
• Compact actuator design has a 60 – 120 psig actuation pressure
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-11 Series PFA Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive fluid applications (up to 100 psig).

MV-11-Manual-3-Way-Valve Series

The MV-11 Series is a 1/2 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive gas and liquid handling systems, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance. With a multi-position mounting base, the 3-way configuration allows for increased mounting flexibility and connector fitting reduction, making it advantageous in areas where workable space is limited.

The MV-11 Series PFA valve features a Fluoropolymer-coated stainless steel spring which reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media. The valve is also equipped with a one-piece machine modified PTFE diaphragm, which provides higher cycle life when compared to conventional PTFE. For increased flexibility, MV-11 Series valves can be fitted with a variety of port configurations, including Parflare and Pargrip tube fittings. The fittings reduce assembly time and installation costs, while ensuring a leak-tight seal for reliability in applications where cleanliness is critical.

The tongue and groove seal of the MV-11 Series valve ensures a positive diaphragm to body seal, resulting in high cycle life. Its full 1/2 inch orifice offers maximum flow capability in a compact package. Flow capacities vary depending on port size and configuration type (up to 3.7 Cv).

The MV-11 Series PFA valve is available with a submergible option, which isolates components from the external environment and allows the valve to remain functional while operating in wet or gaseous corrosive environments.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Available in 3-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Full ½ inch orifice provides maximum flow capability in a compact package
• Fully functional from vacuum to 100 psig
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

The MV-16 Series PFA Diaphragm Valve offers high leak integrity and excellent resistance to corrosion. It is available in 3-way configurations and is designed for ultra-high purity (UHP) and aggressive liquid and gas applications.

MV-16-Manual-PFA-3-Way-Valve Series

The MV-16 Series is a 3/4 inch PFA manual diaphragm valve that is designed for use in ultra-high purity (UHP) and aggressive fluid handling applications, including semiconductor manufacturing operations. The valve is available in 3-way configurations and utilizes a molded PFA body with precision-machined sealing areas for superior leak integrity and chemical resistance.

The MV-16 Series is equipped with a one-piece modified PTFE diaphragm, which provides excellent flexibility and higher cycle life than conventional PTFE. The valve also features an Fluoropolymer-coated stainless steel spring, which reduces the effects of corrosive environments and enables compatibility with a wide range of process media. Depending on customer requirements, MV-16 Series valves can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings. The fittings reduce assembly and installation time, while ensuring a leak-tight seal for performance in applications where cleanliness is critical.

The MV-16 Series PFA valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Its tongue and groove seal ensures a positive diaphragm to body seal, resulting in high cycle life, lower replacement costs, and isolation of process media. The valve features a full 3/4 inch orifice with no restrictions for maximum flow in a compact package at working pressures up to 120 psig. Flow capacities are dictated by configuration and end type (up to 7.9 C¬v for MV-16 with Parbond or Parflare connection). The MV-16 has multi-turn capability, which allows for precise flow adjustment.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Excellent leak integrity
• Modified PTFE diaphragm and Fluoropolymer-coated stainless steel spring provide high cycle life and exceptional resistance to corrosion
• Pressure rated in both forwards and backwards direction from vacuum to 120 psig
• Available in 3-way configuration
• Can be fitted with a variety of port configurations, including Parflare and Parbond tube fittings
• Multi-turn capability allows for precise flow adjustment
• MV-16 Series has multi-turn capability, which allows for precise flow adjustment
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Valve Manifold Boxes (VMBs)

UHP Fluoropolymer ultra clean valves are made from PFA and PTFE for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries.

22 Series PFA Valves Half Inch

These new, ultra clean, fluoropolymer, manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced, leak-free performance for greater safety. They are designed to deliver the highest flow in the smallest package available. Computational fluid dynamics software was utilized to maximize the flow through these valves. These ultra clean valves are for semiconductor liquid applications including high concentration acids and bases, clear chemistries and slurries. Other demanding markets can use these valves for their cleanliness and ability to carry highly corrosive chemicals.

Markets:
• Semiconductor processing
• Chemical Processing
• Analytical Equipment
• Laboratory

Features/Benefits:
• High cycle life in acids and slurry
• Compact footprint with a true lock-out, tag-out design (LOTO)
• Dual point seal provides double the sealing power (patent pending)
• Smooth bore and fully swept path, minimizes particle entrapment areas and prevents stagnation
• 100% leak tested
• Meets SEMI-F57-0301 Standards

Key Applications:
• Chemical Mechanical Polishing (CMP) Slurries
• Ultra high purity processes
• Clear chemistries for semiconductor processes
• Blender systems
• Cleaning systems

The NV70 is an economical, general purpose, high flow diaphragm valve ideally suited when flowing large volumes of corrosive and non-corrosive fluids.

The NV70 is an economical, general purpose, high flow diaphragm valve ideally suited when flowing large volumes of corrosive and non-corrosive fluids. This compact, 316L stainless steel valve ensures positive and consistent shut off with manual or air actuation. The NV70 uses a high fatigue strength diaphragm (Elgiloy®) that creates an external metal seal, and provides a reliable seal to atmosphere. Internally threadless and springless. High cycle life. Compact size. Positive, consistent shut off. Metal-to-metal seal to atmosphere. Cleaned for O2 service. Ideal for high flow applications. Fully functional from vacuum to 150 psig for AOPLPNO / AOPLPNC valves and 250 psig for manual valves.

Compact-Size-Diaphragm-Valve-NV70-Series

The 945Y Series Diaphragm Y-valve combines two valves into a single compact body, which simplifies the integration of a purge system into a gas manifold and improves the effectiveness of the purge process in ultra-high purity semiconductor applications.

The 945Y Series Diaphragm Valve combines two valves into a single compact body, thus simplifying the integration of a purge system into a gas manifold and improving the effectiveness of the purge process. The series offers excellent leak integrity, high cycle life, and low particle generation from vacuum to 3,500 psig — making it ideal for use in high-pressure UHP semiconductor applications, including gas cabinets, valve manifold boxes (VMBs), and upstream process lines.

Diaphragm-Valve-945Y-Series

The 945Y Series valve is available with a variety of manual operators and air-operated (AOP) actuators. It is internally springless and threadless, which minimizes particle generation and entrapment, resulting in extreme cleanliness and reduced process contamination. The valve also features a unique compression member that loads the seal uniformly without the need for threaded components or crimping operations.

The 945Y Series’ unique design controls seat and diaphragm stresses to provide a reliable and maintenance-free service life. Wetted components are fabricated from Veriflo’s proprietary VeriClean™ 316L internally electropolished stainless steel. Seat materials are available in PCTFE, PEEK® and Vespel®, which allow the valve to accommodate a wide range of hazardous and inert process fluids. The diaphragm of the valve is made from a high-strength cobalt-based alloy. These materials, combined with the 945Y Series exacting design features, afford it exceptional corrosion resistance, reliability, and cleanliness at extremely high inlet pressures.

The 945Y Series is offered in several flow path configurations to accommodate upstream, downstream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. Air-operated valves can be configured to provide open-close position indication with a limit switch.

All 945Y valves are fabricated in a Class 100 cleanroom. The internal (seats) seals and metal external seals are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Y-valve configuration allows for a mix of operator combinations and reduces space requirements
• 10 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 3,500 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure
• Cv 0.25 (HP, NC, NO, I), Cv 0.18 (M), Cv 0.17 purge valve

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The 955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators. The Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications.

The Parker 955 Series 1-1/4 inch stainless steel body diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

Diaphragm-Valve-955-Series

The 955 Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The 955 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The 955 series also offers seat materials PCTFE, PEEK® and Vespel® to allow the 955 to be compatible with a wide range of process fluids. These materials combined with the 955 Series exacting design features afford the 955 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.

The 955 Series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. It is also available in multiple body configurations, including the 955Y (Y-valve) and the SM955 (surface-mount).

The internal (seat) seal and metal external seal on all 955 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The 955Y Series Diaphragm Valve (Y block body) combines two high flow capacity valves into a single compact body simplifying the integration of a purge system into a gas manifold while improving the effectiveness of the purge process.

Diaphragm-Valve-955Y-Series

The Parker 955Y Series stainless steel body diaphragm Y-valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The 955Y Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The 955Y Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The 955Y series also offers seat materials PCTFE, PEEK® and Vespel® to allow the 955Y to be compatible with a wide range of process fluids. These materials combined with the 955Y Series exacting design features afford the 955Y Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.

The 955Y Series is offered in several flow path configurations to accommodate up-stream, down-stream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. The series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. For other body configurations refer to the 955 (single valve body) and the SM955 (surface-mount).

The internal (seats) seals and metal external seals on all 955Y Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig (manual and NC air-operated) and 125 psig (NO air-operated)
• Internal leak rate: ≤ 4 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The 930Y Series Diaphragm Valve (Y block body) combines two valves into a single compact body simplifying the integration of a purge system into a gas manifold while improving the effectiveness of the purge process.

The Parker 930Y Series stainless steel body diaphragm Y-valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

Diaphragm-Valve-930Y-Series

The 930Y Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The 930Y Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The 930Y series also offers seat materials PCTFE, PEEK® and Vespel® to allow the 930Y to be compatible with a wide range of process fluids. These materials combined with the 930Y Series exacting design features afford the 930Y Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 300 psig.

The 930Y Series is offered in several flow path configurations to accommodate up-stream, down-stream, and common path purging applications. Internal dead leg volumes are minimized to improve purging effectiveness. The series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. For other body configurations refer to the 930 (single valve body) and the SM930 (surface-mount).

The internal (seats) seals and metal external seals on all 930Y Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 300 psig (manual) and 125 psig (air-operated)
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The SM930 Series is available with a variety of manual operators and air-operated actuators. It provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor modular surface-mount system applications.

Mount-Diaphragm-Valve-SM930-Series

The Parker SM930 Series surface mount stainless steel body diaphragm valve (1-1/8 and 1-1/2 inch body sizes) offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The SM930 Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The SM930 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The SM930 series also offers seat materials PCTFE, PEEK® and Vespel® to allow the SM930 to be compatible with a wide range of process fluids. These materials combined with the SM930 Series exacting design features afford the SM930 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.

The SM930 Series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. It is also available in multiple body configurations, including the 930Y (Y-valve) and the 930 (face seal and tube stub porting).

The internal (seat) seal and metal external seal on all SM930 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Available in C and W seal surface mount 1-1/8 inch and 1-1/2 inch body sizes
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The SM955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators. It provides excellent reliability and leak integrity making it ideal for use in UHP semiconductor modular surface-mount system applications.

Mount-Diaphragm-Valve-SM955-Series

The Parker SM955 Series surface mount stainless steel body diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The SM955 Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The SM955 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The SM955 series also offers seat materials PCTFE, PEEK® and Vespel® to allow the SM955 to be compatible with a wide range of process fluids. These materials combined with the SM955 Series exacting design features afford the SM955 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 250 psig.

The SM955 Series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. It is also available in multiple body configurations, including the 955Y (Y-valve) and the 955 (face seal and tube stub porting).

The internal (seat) seal and metal external seal on all SM955 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Available in standard and high flow C seal and W seal
• 1-1/2 inch surface mount body size
• Flow capacities ranging from .25 Cv (manual standard C seal) to .50 Cv (AOP high flow C seal)
• 5 microinch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 250 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The SG-1 Series PFA Nitrogen Gun is designed for ultra-high purity semiconductor manufacturing applications. Available with FNPT or Parflare connections. Additional options include a 0.2 or 0.5 micron filter and coiled hose assembly (up to 80 psig).

PFA-Nitrogen-Gun-SG-1-Serie

The PFA Nitrogen Gun is suitable for use in ultra-high purity (UHP) semiconductor applications. It utilizes a molded PFA body with precision-machined sealing areas. These materials, coupled with PFA interior surfaces and a one-piece machined modified PTFE diaphragm and poppet, afford the SG-1 Series nitrogen gun with high leak integrity and exceptional corrosion resistance for performance in applications where cleanliness is critical.

The SG-1 Series features a wiper seat, which creates a reliable diaphragm to body seal and provides positive through flow shut-off. Its unique design eliminates the need for elastomer seals, while providing excellent flexibility and long life. It is available with 1/4 inch FNPT or 3/8 inch Parflare connections. The connections reduce assembly and installation time, while ensuring minimal particle generation for contamination-free operation.

Additional options include a 0.2 or 0.5 micron filter and a coiled hose assembly.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• PFA interior surfaces and a one-piece machined modified PTFE diaphragm/poppet provide high flexural life and exceptional corrosion resistance
• Unique design eliminates the need for elastomer seals
• Fully functional from 0 to 80 psig
• Standard features are an integral needle valve for flow control and panel nuts for mounting
• Wiper seat creates a reliable diaphragm to body seal and provides positive through flow shut-off
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +200° F (-17°C to +93° C)

Applications:
• Corrosive and/or specialty chemicals, acids, bases, and slurries
• Semiconductor Tools
• CMP/Slurry Systems

The 930 series Diaphragm Valve (1-1/8 inch body size) is available with a variety of manual operators and air-operated actuators. It provides excellent reliability, leak integrity & cleanliness making it ideal for use in UHP semiconductor applications.

930-Series

The Parker 930 Series 1-1/8 inch stainless steel body diaphragm valve offers excellent leak integrity, high cycle life, and low particle generation making it ideal for use in UHP semiconductor applications.

The 930 Series design has no threads or springs in contact with the process fluid which minimizes particle generation and entrapment for reduced process contamination essential to semiconductor applications. The valve’s exacting design controls seat and diaphragm stresses to provide a reliable and maintenance free service life. The 930 Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance and leak integrity. The body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. The diaphragm is a high strength Cobalt based alloy. The 930 series also offers seat materials PCTFE, PEEK® and Vespel® to allow the 930 to be compatible with a wide range of process fluids. These materials combined with the 930 Series exacting design features afford the 930 Series extreme corrosion resistance and maximum cycle life at inlet pressures up to 300 psig.

The 930 Series air-actuated valves can be configured to provide open-close position indication with either a limit switch or proximity switch. It is also available in multiple body configurations, including the 930Y (Y-valve) and the SM930 (surface-mount).

The internal (seat) seal and metal external seal on all 930 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• 5 micro inch (Ra) electropolish surface finish
• High cycle life (including corrosive service)
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Fully functional from vacuum to 300 psig
• Internal leak rate: ≤ 1 x 10-9 scc/sec He
• External leak rate: ≤ 2 x 10-10 scc/sec He
• 75 psig nominal AOP actuation pressure

Applications:
• Corrosive and specialty gases
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

The 935 Series Tied-diaphragm Valve (1/2 inch) is intended for use in ultra-high purity gas distribution systems. It provides superior control of gases under high-flow, low-pressure conditions, where high leak integrity and absolute purity is essential.

935-Series

The Parker 935 Series Stainless Steel Diaphragm Valve offers excellent leak integrity and gas containment capabilities, making it ideal for use in high-flow UHP applications, including semiconductor fabrication plants. The 935A and 935T have a position indicator to allow operators to easily determine if the valve is open or closed. Upstream and downstream purge ports are available options.

Featuring a tied-diaphragm design that provides reliable positive stem retraction, the 935 Series is internally springless and threadless. This reduces surface area and gas entrapment potential that is inherent in bellows valves, allowing for easier purging and minimal particle generation.

The domed diaphragm creates a metal-to-metal seal to the body and allows for maximum stroke while maintaining low stress on the diaphragm weld area.

The valve body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. Valve seats are available in either PCTFE or Vespel®.

The internal (seat) seal and metal external seal on all 935 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features and Benefits:
• Ideal for high-flow, low-pressure applications
• Standard surface finish of 10 micro inch Ra
• Fully functional from vacuum to 300 psig
• Minimal particle generation and gas entrapment
• Metal-to-metal external seal
• Tied diaphragm eliminates springs in wetted area and enhances safety
• Open/Close valve position indicator
• Internal leak rate: ≤4 x 10-9 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• Valve seats available in either PCTFE (std) or Vespel®
• Two-port, multi-turn handwheel

Applications:
• Corrosive and specialty gases
• Gas distribution systems
• Bulk Specialty Gas Systems (BSGS)

The 935A and 935T Series is a ½ inch valve with a body that incorporates a flow through tube connection up to 2 inches diameter. This design simplifies the integration of drop line isolation valves into lateral gas distribution systems.

Diaphragm-Valve-935A-&-935T-Series

The Parker 935A and 935T Series Stainless Steel Diaphragm Valve offers excellent leak integrity and gas containment capabilities, making it ideal for use in high-flow UHP applications, including semiconductor fabrication plants. The 935A style body orients the handwheel at angle to accommodate tight spaces without sacrificing access to the handwheel. The 935A and 935T have a position indicator to allow operators to easily determine if the valve is open or closed. A purge port option is offered to simplify drop line purging operations.

Featuring a tied-diaphragm design that provides reliable positive stem retraction, the 935 Series is internally springless and threadless. This reduces surface area and gas entrapment potential that is inherent in bellows valves, allowing for easier purging and minimal particle generation.

The domed diaphragm creates a metal-to-metal seal to the body and allows for maximum stroke while maintaining low stress on the diaphragm weld area.

The valve body is internally electropolished Vericlean™ 316L stainless steel. Vericlean™ is Parker’s proprietary UHP grade stainless steel. Valve seats are available in either PCTFE or Vespel®.
The internal (seat) seal and metal external seal on all 935 Series valves are Helium leak tested using a mass spectrometer to ensure performance and reliability in demanding UHP applications.

Markets:
• Fluid & gas handling
• Process control
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features and Benefits:
• Ideal for high-flow, low-pressure applications
• Standard surface finish of 10 micro inch Ra
• Fully functional from vacuum to 300 psig
• Minimal particle generation and gas entrapment
• Metal-to-metal external seal
• Tied diaphragm eliminates springs in wetted area and enhances safety
• Open/Close valve position indicator
• Internal leak rate: ≤4 x 10-9 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• Valve seats available in either PCTFE (std) or Vespel®
• Two-port, multi-turn handwheel

Applications:
• Corrosive and specialty gases
• Gas distribution systems
• Bulk Specialty Gas Systems (BSGS)

Parker Hannifin Corporation’s Veriflo Division presents the 500 Series Manual & Pneumatic Operated Bellows Valves. These valves are designed with the industry’s leading straight-through full flow.

Parker Hannifin Corporation’s Veriflo Division presents the 500 Series Manual & Pneumatic Operated Bellows Valves. These valves are designed with the industry’s leading straight through full flow. This allows for maximum gas transfer through the main and lateral lines inside the fabrication facility. Standard surface finish of 10 micro inch Ra. Fully functional from vacuum to 250 psig. Serialized and heat code traceable. 100% Helium leak tested. Optimum purge port location. Standard full internal electroplish. AOP version available in
1/2” size. Vericlean™, Veriflo’s low sulfur high purity 316L Stainless Steel enhances electropolishing, welding, and corrosion resistance.

Bellows-Valve-UHP500-Series

The 970 Series Diaphragm Valve offers high cycle life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow ultrahigh-purity semiconductor tool.

Diaphragm-Valve-970-Series

The Parker 970 provides high flow, .70 Cv, and superior leak integrity, making it ideal for use in ultra-high purity semiconductor tool applications, including gas boxes, gas cabinets, and valve manifold boxes (VMBs).

The 970 Series features a full internal and external electropolish resulting in a surface finish on all wetted surfaces. This, coupled with its internally springless and threadless design, results in reduced gas entrapment potential and minimal particle generation. The valve body is constructed from Veriflo’s low-sulfur, high-purity Vericlean™ 316L Stainless Steel, affording it long life and higher resistance to corrosion. The replaceable valve seats are manufactured from PCTFE resulting in exceptional shut-off performance, and lower cost of ownership.

The 970 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually or air-operated with a maximum operating pressure of 250 and 150 psig respectively.

All 970 Series valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in applications where leak integrity is critical.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace

Features/Benefits:
• Standard surface finish of 5 micro inch Ra
• Flow capacity = 0.70 Cv
• High cycle life
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Internal leak rate: ≤1 x 10-9 scc/sec He (rated)
• External leak rate: ≤2 x 10-10 scc/sec He
• AOP actuation pressure: 70 – 125 psig nominal
• Internal volume 0.59 cc (including face seal fittings)
• Maximum Operating Pressure: 250 psig (manual), 150 psig (AOP)

Applications:
• Corrosive and specialty gases
• Gas boxes
• Gas cabinets
• Valve manifold boxes (VMB)

The 870 Series Diaphragm Valve offers long life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow, high-purity applications (maximum flow capacity = 0.70 Cv).

Diaphragm-Valve-870-Series

The Parker 870 provides high flow, .70 Cv, and superior leak integrity making it ideal for use in high-purity applications, including semiconductor wafer, solar panel and LCD screen manufacturing processes.

The 870 Series features a full internal and external electropolish resulting in a 10 Ra surface finish on all wetted surfaces. This, coupled with its internally springless and threadless design, results in reduced gas entrapment potential and minimal particle generation. The valve body is constructed from Veriflo’s low-sulfur, high-purity Vericlean™ 316L Stainless Steel, affording it long life and higher resistance to corrosion. The replaceable valve seats are manufactured from PCTFE resulting in exceptional shut-off performance, and lower cost of ownership.

The 870 series diaphragm valve offers high flow, .70 Cv, in a compact package, which makes it suitable for use in situations where workable space is limited, such as gas boxes, gas cabinets, and valve manifold boxes (VMBs). It can be manually or air-operated with a maximum operating pressure of 250 and 150 psig respectively.

All 870 Series valves are inboard and across-seat Helium leak tested using a mass spectrometer to ensure performance and reliability in applications where leak integrity is critical.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial
• Solar

Features/Benefits:
• Standard surface finish of 10 micro inch Ra
• Flow capacity: 0.70 Cv
• High cycle life
• Internally springless and threadless design minimizes particle generation and gas entrapment
• Internal leak rate: ≤1 x 10-9 scc/sec He
• External leak rate: ≤2 x 10-10 scc/sec He
• AOP actuation pressure: 70 – 125 psig
• Internal volume 0.59 cc (including face seal fittings)
• Maximum Operating Pressure: 250 psig (manual), 150 psig (AOP)

Applications:
• Corrosive and specialty gases
• Gas boxes
• Gas cabinets
• Valve manifold boxes (VMB)

The MV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.

MV-20 Series

The MV-20 Series is a PTFE fluoropolymer manual diaphragm valve used for flow control of abrasive slurry media and aggressive fluids in semiconductor and clean-area applications. The valve’s flow path design produces minimal pressure drop, which allows for lower pressure requirements upstream and improved fluid flow dynamics. It is available in 2-way and 3-way configurations, along with three orifice sizes (1/4 inch, 1/2 inch, and 1 inch). Port sizes range from 1/4 to 1-1/4 inches, and can be supplied with Parflare, Pargrip or Nippon Pillar S300 end connections.

The body of the MV-20 Series slurry valve is made from virgin 100% ultra-high purity PTFE for superior chemical resistance. This, coupled with a one-piece modified PTFE diaphragm, affords the valve with excellent flexibility and maximum cycle at pressures up to 100 psig. The valve itself is also highly compact, which enables operators to conserve critical cleanroom and sub-fab space.

The angled and rounded flow path of the MV-20 Series, plus an open and swept bowl shape around its diaphragm, minimizes turbulence and eliminates sharp angles that can cause fluid shear. This reduces particle entrapment and provides increased protection against corrosion.

Overall, the valve’s design makes it particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarization or chemical-mechanical polishing) processes employed in semiconductor fabrication. The MV-20 Series is also suitable for a wide range of other clean-area processing and analytical applications, such as controlling the flow of acids, chemicals, and DI water.

The internal (seat) seal of the MV-20 Series is Helium leak tested to ensure performance and reliability in clean-area applications, where high leak integrity and minimal particle generation are of the utmost importance.

For an air-operated version of the MV-20 Series slurry valve, refer to the PV-20 Series.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Exceptional resistance to corrosion
• Evenly distributed seat sealing forces minimizes diaphragm and valve seat strain while stabilizing valve back pressure capability
• Maximized diaphragm thickness minimizes potential for permeation while maximizing cycle life.
• Self-draining design aids reliability when used with aggressive fluids in an open-loop system
• Compliant with the SEMI-F57-0301 standard for polymer components
• Ambient temperature range: 0°F to +150° F (-17°C to +66° C)
• Fluid temperature range: 0°F to +266° F (-17°C to +130° C)
• Fully functional from vacuum to 100 psig

Applications:
• Semiconductor Tools
• Tool Hook-ups
• Slurry and Aggressive Chemical Distribution Systems
• DI Water

The MV-6 Series PTFE Manual Ball Valve offers high cycle life and exceptional resistance to corrosion. It is designed full port for minimal flow restriction and is ideal for use in aggressive chemical applications (up to 120 psig).

Manual-PTFE-Ball-Valve-MV-6-Series

The MV-6 Series is a manually operated ball valve that is suitable for use in ultra-high purity (UHP) and corrosive chemical distribution systems, including semiconductor manufacturing and process instrumentation applications. The valve is designed full port for minimal flow restriction and features a floating ball without o-rings, which ensures bubble tight sealing and leak-free operation at working pressures from vacuum up to 120 psig (bidirectional).

The wetted components of the MV-6 Series ball valve are made entirely of modified PTFE for superior chemical resistance and maximum cycle life. This, coupled with valve’s highly durable non-wetted materials of construction (HDPE, PVC, PVDF), afford it excellent reliability and maintenance-free service in even the most aggressive chemical handling applications.

The MV-6 Series ball valve comes available in three port sizes (1/4 inch, 1/2 inch, and 1 inch) and flow capacities ranging from 1.88 to 28.06 Cv to meet the unique requirements of customers’ systems. All versions have a low-torque tee handle that is 1/4 turn operated, thus enabling quick shut-off in applications where safety and cleanliness are mission-critical.

MV-6 Series ball valves are offered for inline and panel-mounted applications.

Markets:
• Semiconductor
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Features/Benefits:
• Ideal for use in aggressive and/or corrosive fluid handling systems, including ultra high purity and process instrumentation applications
• Designed full port for minimal flow restriction
• Available in 1/4 inch, 1/2 inch, and 1 inch sizes
• Modified machined PTFE body offers high cycle life
• Ambient temperature range: +41°F to +104° F (+5°C to +40° C)
• Fluid temperature range: +41°F to +104° F (+5°C to +40° C)
• Cv ranges from 1.88 to 28.06 depending on orifice size
• Fully functional from vacuum to 120 psig

Applications:
• Corrosive liquids
• Drains
• Desalination Plants
• Process Instrumentation